Applied Materials, Inc. has introduced two new chipmaking systems designed to solve emerging challenges in leading-edge semiconductor manufacturing by achieving precision processing in increasingly deep and narrow 3D structures. The new deposition and etch systems help chipmakers extend scaling in logic and memory to deliver higher performance, improved energy efficiency, and better manufacturing yield for next-generation AI chips. The systems are being used by leading logic and memory chipmakers for advanced node manufacturing.

The surge in AI compute is accelerating the industry's transition to advanced 3D device architectures, including gate-all-around (GAA) transistors and high-layer-count 3D NAND. As features become deeper and narrower in these vertical structures, conventional deposition and etch processes struggle to distribute materials uniformly from top to bottom, creating variability that can degrade electrical performance and reduce yield.

To address this, Applied is introducing Centris Spectral SiN ALD and Producer Selectra Mo Etch. Together, they provide chipmakers with precise control over both dielectric film deposition and metal removal in high-aspect-ratio structures. The result is more uniform materials engineering at advanced nodes, enabling continued 3D scaling with better device performance, tighter process control and improved manufacturability across logic and memory applications.

Centris Spectral SiN ALD

Silicon nitride (SiN) is a foundational material for steps including surface passivation, dielectric isolation and the creation of patterning spacers. Conventional plasma-enhanced deposition is not able to uniformly treat the high-aspect-ratio structures in advanced 3D chip architectures, leading to poor-quality SiN films. Centris Spectral SiN ALD solves this issue with an innovative, high-density microwave plasma technology that deposits high-quality SiN within tall, narrow structures. The system enables dense, uniform SiN deposition at low temperatures, even in challenging 3D structures.

The system is the latest based on Applied's Spectral ALD platform, a series of ALD tools featuring a quad reactor design with precision chemical delivery, various plasma and thermal processing capabilities, and specialized hardware for temporal and spatial ALD operation.

Producer Selectra Mo Etch

As 3D NAND scales to higher layer counts, new metal integration steps are pushing conventional patterning methods beyond their limits. Low-resistance metals such as molybdenum (Mo) are being adopted for wordline metallization, which requires precise isolation between individual wordlines to prevent electrical shorts and reduce unwanted capacitance. Traditionally, wet etch has been used to separate wordlines, but in tall 3D stacks, liquid chemistries have trouble reaching the full depth of high-aspect-ratio features.

Producer Selectra Mo Etch introduces a new capability for highly selective metal removal, enabling precise, uniform wordline separation across the full stack. Using engineered process control and advanced gas delivery, the system overcomes wet etch limitations to deliver superior top-to-bottom uniformity and tight profile precision in deep features. By reducing cell-to-cell variability in the 3D NAND stack, the system helps lower leakage and improve data retention.

Applied is highlighting these innovations at the 2026 IEEE Symposium on VLSI Technology & Circuits. During the conference, Applied is hosting a panel discussion on June 16 examining how system architectures, logic and memory technologies, advanced packaging, and manufacturing must evolve to enable the next wave of AI-driven compute.

Barclays analyst Tom O'Malley has maintained an Overweight rating on Applied Materials (NASDAQ: AMAT) and raised the price target to $590 from $500. The revised target reflects increased confidence in the company's performance prospects.

The rating upgrade comes as the firm evaluates the semiconductor equipment sector's outlook. Applied Materials remains a key player in the industry, and the new price target suggests potential upside from current levels.